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Title:
レーザ加工のための微細スケールでの時間的制御
Document Type and Number:
Japanese Patent JP7119018
Kind Code:
B2
Abstract:
The present application relates to a method and an apparatus. The method includes directing a laser beam (404) to a target (410) along a scan path at a variable scan velocity and adjusting a digital modulation during movement of the laser beam (404) along the scan path and in relation to the variable scan velocity so as to provide a fluence at the target (410) within a predetermined fluence range along the scan path. the method can further include the step of adjusting a width of the laser beam (404) with a zoom beam expander (418). The apparatus (400) include a laser source (402) situated to emit a laser beam (404), a 3D scanner (408) situated to receive the laser beam (404) and to direct the laser beam (404) along a scan path in a scanning plane at the target (410), and a laser source digital modulator coupled to the laser source (402) so as to produce a fluence at the scanning plane along the scan path that is in a predetermined fluence range as the laser beam scan speed changes along the scan path.

Inventors:
Martin Sen, Robert Jay
One, Chi
Application Number:
JP2020050717A
Publication Date:
August 16, 2022
Filing Date:
March 23, 2020
Export Citation:
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Assignee:
N Lite, Inc.
International Classes:
B23K26/0622; B22F3/105; B22F3/16; B23K26/00; B23K26/21; B23K26/34; B29C64/153; B29C64/273; B29C64/393; B33Y10/00; B33Y50/02
Domestic Patent References:
JP2006045584A
JP2012059920A
JP2003129862A
Attorney, Agent or Firm:
Osamu Yamamoto
Toru Miyamae
Motoharu Nakanishi
Ryota Suematsu