PURPOSE: To use a general type stepping motor or servomotor as an actuator and enable resolving power of submicron order to be attained, by converting a driving direction of the actuator into an orthogonal direction through a tilt surface formed in a table.

CONSTITUTION: If an actuator 5 advances from the position of a power point 15 by a driving length l1, a table 3, pressing its coil spring 6 to be contracted, moves to a left side by a stroke l3. While if the actuator 5 retracts by a driving length l2, the table 3 moves right by a stroke l4 by tension of the coil spring 6. The more approaches an angle θ, formed by a moving direction of the table and a tilt surface 4a of a tilt block 4, to 90°, the smaller a moving distance la of the actuator decreases a moving distance lt of the table. That is, resolving power can be changed optionally further in a wide range by changing an angle of the tilt surface. Accordingly, the resolving power of submicron order is obtained by generally using a stepping motor or a servomotor.