Title:
FIRING FURNACE AND PRODUCTION METHOD OF SILICON CARBIDE POWDER
Document Type and Number:
Japanese Patent JP2009263175
Kind Code:
A
Abstract:
To provide a firing furnace in which a silicon carbide powder having higher purity with a reduced content of impurities can be produced, and to provide a production method of a silicon carbide powder.
The firing furnace 100 is equipped with a process chamber 3 segmented by a muffle 4, a crucible 5 placed in the process chamber 3 for housing a substance 8 to be fired, and an inert gas supply tube 6 externally supplying an inert gas, wherein a void space 45 is formed between the muffle 4 and the crucible 5, and an open end 62 of the inert gas supply tube 6 is placed in the void space 45.
Inventors:
MIYANO MARI
Application Number:
JP2008115816A
Publication Date:
November 12, 2009
Filing Date:
April 25, 2008
Export Citation:
Assignee:
BRIDGESTONE CORP
International Classes:
C01B31/36; F27B5/10; F27B5/16; F27B14/04; F27D7/02
Domestic Patent References:
| JPS59215582A | 1984-12-05 | |||
| JP2001358084A | 2001-12-26 | |||
| JP2004300199A | 2004-10-28 | |||
| JP2005221135A | 2005-08-18 | |||
| JPH11106212A | 1999-04-20 | |||
| JPH11209198A | 1999-08-03 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
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