To provide a mounting stand device where the inside of a hollow leg part is held to a pressure atmosphere in which discharge is not generated, and discharge between feeders can be prevented.
In the fitting structure, a mounting stand device 36 comprising: a mounting stand 38 provided with a heating means 42; a hollow leg part 40 supporting the same; and feeders 44A, 44B or the like connected to the heating means is fitted into a treatment vessel 4 capable of evacuation. The opening part formed at the bottom part of the treatment vessel is equipped with: a bottom part fitting stand 56 provided so as to close the opening part; a metal seal member 74 of a soft metallic material interposed between the lower end part of the leg part and the bottom part fitting stand; a fixing means 72 of fixing the lower end part of the leg part to the side of the bottom part fixing stand; an inert gas feeding means 84 of feeding inert gas into the leg part and forming a pressure atmosphere with which discharge is not generated between the feeders; and a means 86 of exhausting the atmosphere in the leg part for exhausting the atmosphere in the leg part as the flow rate thereof is limited.
KOMATSU TOMOHITO
MOCHIZUKI TAKASHI
| JP2003133242A | 2003-05-09 | |||
| JP2004091849A | 2004-03-25 | |||
| JPH02242599A | 1990-09-26 | |||
| JP2001068423A | 2001-03-16 | |||
| JPH03128668A | 1991-05-31 | |||
| JPH0629247A | 1994-02-04 |