FIXING STRUCTURE, SUBSTRATE CONVEYANCE DEVICE, SUBSTRATE PROCESSING DEVICE, AND HEIGHT ADJUSTMENT METHOD OF FIXING STRUCTURE

Title:

FIXING STRUCTURE, SUBSTRATE CONVEYANCE DEVICE, SUBSTRATE PROCESSING DEVICE, AND HEIGHT ADJUSTMENT METHOD OF FIXING STRUCTURE

Document Type and Number:

Japanese Patent JP2017204584

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide fixing structure, a substrate conveyance device, a substrate processing device, and a height adjustment method of the fixing structure that can fine-tune attachment height of an attachment member to a base member without separately preparing an adjustment member such as a shim.SOLUTION: Fixing structure 80 according to one embodiment includes: a base member 61; an attachment member 71 attached to the base member 61; a height adjustment mechanism 90 for adjusting attachment height of the attachment member 71 to the base member 61; and a fixing mechanism 100 for fixing the attachment member 71 whose height is adjusted by the height adjustment mechanism 90 to the base member 61. The height adjustment mechanism 90 includes a plurality of screw adjustment units 91 provided in a freely height adjustable manner to the attachment member 71.SELECTED DRAWING: Figure 3

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Inventors:

KUROKI YUSUKE

Application Number:

JP2016096154A

Publication Date:

November 16, 2017

Filing Date:

May 12, 2016

Export Citation:

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Assignee:

EBARA CORP

International Classes:

H01L21/677; H01L21/304

Attorney, Agent or Firm:

Sumio Tanai
Yasushi Matsunuma
Yuichiro Shimizu
Hisanori Takahashi
Saito Takanobu

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