Title:
フランジ機構と切削装置
Document Type and Number:
Japanese Patent JP7373936
Kind Code:
B2
Abstract:
To enable facilitation of maintenance.SOLUTION: In a flange mechanism 40, a cutting blade 21 having a disk-like base 212 with an attachment hole 211 and also having a cutting edge 213 provided on an outer peripheral edge of the base 212 is attached to a spindle 23. The flange mechanism 40 comprises a support flange 42 having: a boss portion 43 extending in forward and backward directions and inserted in the attachment hole 211 in the base 212 of the cutting blade 21; and a flange portion 44 that is a flange-like member projecting radially outward from a rear side of the boss portion 43 and that has an end surface 443 supporting the base 212 on an outer peripheral edge of a support surface 441 opposite the cutting blade 21. The flange portion 44 has a plurality of through-holes 446 penetrating between the end surface 443 and the boss portion 43, from a side of the support surface 441 to a side of a rear surface 447. Negative pressure from a suction source 25 is applied to the cutting blade 21 via the through-hole 446, and the cutting blade 21 is fixed to the flange portion 44.SELECTED DRAWING: Figure 3
Inventors:
Hisashi Arakida
Application Number:
JP2019134544A
Publication Date:
November 06, 2023
Filing Date:
July 22, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B24B27/06; H01L21/301
Domestic Patent References:
| JP2019104086A | ||||
| JP2015023222A | ||||
| JP2019104068A | ||||
| JP2018094682A |
Foreign References:
| US20160311127 |
Attorney, Agent or Firm:
Sakai International Patent Office
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