Title:
フランジ機構
Document Type and Number:
Japanese Patent JP6855117
Kind Code:
B2
Abstract:
The present invention provides a flange mechanism to prevent cutting scraps from entering therein from a slight gap between a mounting hole of the fixed flange and a boss part of a mounter. According to the present invention, the flange mechanism comprises: the mounter fixed to the front end of a spindle supported to a spindle housing to be able to rotate so as to support an annular cutting blade; and a fixing flange to fix the cutting blade to the mounter. The mounter comprises: the cylindrical boss part to support the inner circumference of the cutting blade; a support flange part protruding to the outside in a diameter direction from the rear side of the cylindrical boss part to have a first support surface formed on the front surface side of an outer edge to support the cutting blade; and a cylindrical part integrally formed with the support flange part on the rear side of the support flange part and having an annual groove formed on an outer circumference. The support flange part includes a plurality of suction ports formed on a side facing the fixed flange, and the flange and cylindrical parts of the mounter have a plurality of suction paths communicating with the suction port and the annular groove. The fixed flange comprises: a flange part having a second support surface formed on the outer edge to hold the cutting blade with the first support surface of the support flange part; and a cap part to cover the boss part of the mounter integrally formed with the flange part.
Inventors:
Nobuhiko Wakita
Koji Kusube
Koji Kusube
Application Number:
JP2017041317A
Publication Date:
April 07, 2021
Filing Date:
March 06, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B27/06; B24B45/00; H01L21/301
Domestic Patent References:
| JP201523222A | ||||
| JP200061804A | ||||
| JP2013146797A | ||||
| JP10277934A | ||||
| JP2006123117A |
Foreign References:
| US20130217310 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro