フランジ機構

Japanese Patent JP7224243

B2

The purpose of the present invention is to provide a flange mechanism configured so that contamination on a communication path for suction and fixation can be reduced more than before. In the flange mechanism (1), a cutting blade (124) comprising a mounting hole (124-3) at a center portion and having cutting edges (124-2) at outer periphery portions is mounted on a spindle (122) which acts as a rotary shaft. The flange mechanism (1) includes: a cylindrical boss portion (2), which has a front side inserted into the mounting hole (124-3) of the cutting blade (124) and a rear side to which the spindle (122) is fixed; and a flange portion (3), which extends in a radial direction from the rear side of the boss portion (2) and is provided with a supporting surface (3-1) formed on a front surface thereof to be in contact with the cutting blade (124). The support surface (3-1) comprises a suction hole (3-3) through which the cutting blade (124) is suctioned and fixed and the communication path (6) through which the suction hole (3-3) is communicated with a suction source (18). The communication path (6) comprises a switch valve (17) which communicates with a fluid supply source (19) which supplies fluid for cleaning the communication path (6) and switches connection between the fluid supply source (19) and the suction source (18).

Chika Mori
Itsuto Kiuchi

JP2019108232A

February 17, 2023

June 10, 2019

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Disco Co., Ltd.

B24B45/00; H01L21/301

JP201875688A
JP5214291A
JP2014100772A
JP2015193056A

US6042461

Sakai International Patent Office

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