Title:
閃光放射装置および光加熱装置
Document Type and Number:
Japanese Patent JP4029613
Kind Code:
B2
Abstract:
In a flash emitting device, a flash from the plurality of flash discharge lamps is emitted on a work piece. The flash emitting device has a plurality of flash discharge lamps arranged in parallel including side flash discharge lamps located on sides of the flash emitting device and center flash discharge lamps located at the center portion of the flash emitting device, side main condensers, each of which is connected to one of the side flash discharge lamps, and center main condensers, each of which is connected to one of the center flash discharge lamps, wherein a voltage to which the side main condensers is charged is higher than that to which the center main condensers are charged.
Inventors:
Hiromasa Eguchi
Application Number:
JP2001391406A
Publication Date:
January 09, 2008
Filing Date:
December 25, 2001
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01L21/26; H01J7/24; H01L21/00; H01L21/027; H01L21/324; H01L21/477; H05B3/00; H05B41/30; H05B41/32
Domestic Patent References:
| JP63241924A | ||||
| JP62020308A | ||||
| JP56024798A | ||||
| JP11338019A | ||||
| JP2109030A | ||||
| JP2001014732A | ||||
| JP8153343A |
Attorney, Agent or Firm:
Masahiko Oi