Title:
浮上搬送装置及び浮上搬送方法
Document Type and Number:
Japanese Patent JP5291281
Kind Code:
B2
Abstract:
A levitation transportation device capable of adjustment when an object being transported is displaced from the center of a transportation path, A levitation transportation device having a transportation path forming a transportation router for an object to be transported, a plurality of jetting nozzles for transporting the object in a levitated manner along the transportation path, one or more detection sections for detecting the direction of the transportation of the object being transported in the transportation path and a control section for independently controlling the plurality of jetting nozzles based on a detection result by the detection sections.
Inventors:
Masayuki Miyata
Yu Umeda
Yu Umeda
Application Number:
JP2004189444A
Publication Date:
September 18, 2013
Filing Date:
June 28, 2004
Export Citation:
Assignee:
Watanabe Shoko Co., Ltd.
Masayuki Miyata
Masayuki Miyata
International Classes:
B65G49/07; B65G51/03; H01L21/677
Domestic Patent References:
| JP5211225A | ||||
| JP62130925A | ||||
| JP9156755A |
Attorney, Agent or Firm:
Hisao Fukumori