Title:
浮上搬送装置及び浮上ユニット
Document Type and Number:
Japanese Patent JP5239606
Kind Code:
B2
Inventors:
Kensuke Hirata
Yoshiyuki Wada
Tanaka cutting
Yoshiyuki Wada
Tanaka cutting
Application Number:
JP2008206174A
Publication Date:
July 17, 2013
Filing Date:
August 08, 2008
Export Citation:
Assignee:
Ihi Co., Ltd.
International Classes:
H01L21/677; B65G49/06; B65G51/03
Domestic Patent References:
| JP2004331395A | ||||
| JP57121524A | ||||
| JP8508456A | ||||
| JP59031039A | ||||
| JP2006182563A |
Foreign References:
| WO2007088936A1 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu