Title:
流量制御機器絶対流量検定システム
Document Type and Number:
Japanese Patent JP4648098
Kind Code:
B2
Abstract:
A flow rate control device absolute flow rate check system can perform a highly accurate absolute flow rate check of a flow rate control device by a process gas by including: an exhaust flow path (31) communicating an inlet of a vacuum pump (14) with a gas flow path (30) between a first cutoff valve (21) and a second cutoff valve (22); a third cutoff valve (23), a pressure sensor (11), a temperature sensor (12), and a fourth cutoff valve (24) which are arranged in the exhaust flow path (31); and a check control device connected to them and storing a volume value of a predetermined space formed by compression factor data unique to the gas type, an outlet of a mass flow controller (10), the second cutoff valve (22), and the third cutoff valve (23). During a first measurement, pressure P1 and temperature T1 are obtained and mass G1 is acquired from the corresponding first compression factor Z1 and volume V. During a second measurement, pressure P2 and temperature T2 are obtained and mass G2 is acquired from the corresponding second compression factor Z2 and volume V. An absolute flow rate of the mass flow controller (10) is checked according to a difference between the mass G1 and G2.
Inventors:
Aksaka Takasaka
Minoru Ito
Yoji Mori
Hiroki Doi
Minoru Ito
Yoji Mori
Hiroki Doi
Application Number:
JP2005166152A
Publication Date:
March 09, 2011
Filing Date:
June 06, 2005
Export Citation:
Assignee:
CKD Corporation
International Classes:
G01F25/00; G01F1/00; G01F15/02
Domestic Patent References:
| JP11502026A | ||||
| JP11087318A | ||||
| JP2002099330A | ||||
| JP2003269258A | ||||
| JP54084763A | ||||
| JP3094122A | ||||
| JP6160152A | ||||
| JP9184600A | ||||
| JP7306084A | ||||
| JP7281760A | ||||
| JP7134052A |
Attorney, Agent or Firm:
Patent Business Corporation Cosmos Patent Office