Title:
FLOW RATE CONTROLLER
Document Type and Number:
Japanese Patent JPH05113825
Kind Code:
A
Abstract:
PURPOSE:To reduce the error between a set flow rate and an actual flow rate in the beginning of control over a flow rate by the flow rate controller. CONSTITUTION:The flow rate is measured by a bridge circuit 14 and controlled by a control valve 12; when the error between the set flow rate and actual flow rate is large, the opening extent of the control valve 12 is controlled for a set time according to a value stored in the flow rate controller. For the purpose, the flow rate controller which has a time counter controls the opening extent of the control valve 12 for only the set value according to the value stored in the flow rate controller to reduce the error between the set flow rate.
Inventors:
TODA HISANAO
Application Number:
JP27421991A
Publication Date:
May 07, 1993
Filing Date:
October 22, 1991
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
B01J4/02; C23C14/56; G05D7/06; H01L21/205; (IPC1-7): B01J4/02; C23C14/56; G05D7/06; H01L21/205
Attorney, Agent or Firm:
Kisaburo Suzuki (1 outside)