Title:
Flow sensor inspection method, inspection system, and program for inspection system
Document Type and Number:
Japanese Patent JP6289997
Kind Code:
B2
Abstract:
In order to provide an inspection system of a flow sensor capable of charging an appropriate pressure in a flow path in response to the inspection target flow sensor and significantly reducing a waiting time until a start of an inspection, the inspection system is provided with: fluid resistances respectively provided for a plurality of respective branch flow paths branched in a downstream of an upstream side flow path where the inspection target flow sensor is provided: valves respectively provided for the respective branch flow paths; a fluid sensor having at least a part thereof being provided in an upstream side than each of the fluid resistances for measuring a pressure or a flow rate of the fluid; and a valve opening/closing control part configured to allow a plurality of the valves to be in opened states at the time of inspecting the inspection target flow sensor.
Inventors:
Tadahiro Yasuda
Takashi Shirai
Takashi Shirai
Application Number:
JP2014100973A
Publication Date:
March 07, 2018
Filing Date:
May 14, 2014
Export Citation:
Assignee:
HORIBA STEC Co., Ltd.
International Classes:
G01F25/00; G01F1/00; G01F1/68
Domestic Patent References:
| JP10142015A | ||||
| JP9016268A |
Foreign References:
| WO2008072614A1 | ||||
| US20100030390 | ||||
| US20010004903 | ||||
| US5307667 |
Attorney, Agent or Firm:
Ryuhei Nishimura
Saito Shindai
Saito Shindai