Title:
FLUID CONTROL DEVICE AND GAS TREATMENT EQUIPMENT USING IT
Document Type and Number:
Japanese Patent JP2002089798
Kind Code:
A
Abstract:
To provide an integrated fluid control device capable of easily coping with extension and change of a line, and gas treatment equipment provided with such a fluid control device.
In this fluid control device, each line A1, A2, A3, A4, A5, B1, B2, B3 is detachably installed on a base board through plural brackets 8, 9, 18, 19, 20, and passage connecting means 47, 48 are removably attached at upper parts.
Inventors:
FUJIMOTO HIDEKI
UZAWA NOBORU
SATO NAOYUKI
YAMAJI MICHIO
TANAKA SHIGEAKI
KAWANO YUJI
OMATA YASUYUKI
FUKUI MASAKAZU
UZAWA NOBORU
SATO NAOYUKI
YAMAJI MICHIO
TANAKA SHIGEAKI
KAWANO YUJI
OMATA YASUYUKI
FUKUI MASAKAZU
Application Number:
JP2000274546A
Publication Date:
March 27, 2002
Filing Date:
September 11, 2000
Export Citation:
Assignee:
ULVAC CORP
FUJIKIN KK
FUJIKIN KK
International Classes:
F15B1/00; F16K27/00; H01L21/205; F17D1/02; H01L21/302; H01L21/3065; (IPC1-7): F17D1/02; H01L21/205; H01L21/3065
Domestic Patent References:
| JP2001517767A | 2001-10-09 | |||
| JPH07122500A | 1995-05-12 | |||
| JPS62180200A | 1987-08-07 | |||
| JPH09184599A | 1997-07-15 | |||
| JPH10227368A | 1998-08-25 |
Foreign References:
| WO1999015818A1 | 1999-04-01 | |||
| WO1999022165A1 | 1999-05-06 | |||
| WO1999064772A1 | 1999-12-16 |
Attorney, Agent or Firm:
Eisuke Kishimoto (4 outside)
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