To provide a purge line change block joint for supplying a different purge gas between lines without considerably altering a fluid control device, and to provide a fluid control device with such a purge line change block joint.
In at least one Q among a plurality of lines, a purge line change block joint 5 is connected to an upper side of a three-way valve passage part. The purge line change block joint 5 includes: a process gas inlet passage 5a communicating to a process gas inlet passage 7a of the three-way valve passage part; an outlet passage 5b allowing the process gas inlet passage 5a to communicate with an outlet passage 8a of the three-way valve passage part; a passage closing part 5c which does not communicate with a purge gas inlet passage 9a of the three-way valve passage part to close the passage; and a novel purge gas inlet passage 5d which communicates with the outlet passage 5b and is opened on a top face.
YOMO IZURU
KOGAI MUTSUNORI
MAKINO MEGUMI
MATSUDA TAKAHIRO
| JPH11311355A | 1999-11-09 | |||
| JP2000254900A | 2000-09-19 | |||
| JP2000320697A | 2000-11-24 | |||
| JP2002515107A | 2002-05-21 |
| WO2007032147A1 | 2007-03-22 | |||
| US7806143B2 | 2010-10-05 |
Akira Watanabe
Matsumura Naoto
Next Patent: CROSS SHAFT UNIVERSAL JOINT AND METHOD OF MANUFACTURING YOKE FOR UNIVERSAL JOINT