Title:
流体制御装置
Document Type and Number:
Japanese Patent JP6605002
Kind Code:
B2
Abstract:
A fluid control device (2) includes a piezoelectric actuator (23) and a deformable substrate (20). The piezoelectric actuator (23) includes a piezoelectric element (233) and a vibration plate (230). The piezoelectric element (233) is attached on a first surface (230b) of the vibration plate (230) and is subjected to deformation in response to an applied voltage. The vibration plate (230) is subjected to a curvy vibration in response to the deformation of the piezoelectric element (233). A bulge (230c) is formed on a second surface (230a) of the vibration plate (230). The deformable substrate (20) includes a flexible plate (22) and a communication plate (21) stacked on each other. A synchronously-deformed structure is defined by the flexible plate (22) and the communication plate (21). The deformable substrate (20) is bent in the direction toward the vibration plate (230). There is a specified depth (´) maintained between the flexible plate (22) and the bulge (230c) of the vibration plate (230). The flexible plate (22) includes a movable part (22a) corresponding to the bulge (230c) of the vibration plate (230).
Inventors:
Chen Sechang
黄 ▲けい▼峰
Han Yong Long
Toshihiro Chen
Konobu
黄 ▲けい▼峰
Han Yong Long
Toshihiro Chen
Konobu
Application Number:
JP2017168148A
Publication Date:
November 13, 2019
Filing Date:
September 01, 2017
Export Citation:
Assignee:
Microjet Technology Co.,Ltd.
International Classes:
F04B43/02; B06B1/06; F04B43/04; H01L41/053; H01L41/09
Domestic Patent References:
| JP201357246A |
Foreign References:
| US20140377099 | ||||
| CN205383064U | ||||
| WO2012141113A1 |
Attorney, Agent or Firm:
Hitoshi Shinbo