Title:
流体制御装置
Document Type and Number:
Japanese Patent JP6691850
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a fluid control device that can suppress creeping discharge.SOLUTION: A fluid control device has: a separation member 30 that is formed of insulation material, and has a film part 32 that separates between a channel 22 and a non-channel 55 of a fluid; an insulation member 40 in contact with the separation member 30; a conductive member 44 in contact with the insulation member 40; and a closing member 46 that is formed of insulation material, and closes the conductive member 44 between itself and the insulation member 40 surface.SELECTED DRAWING: Figure 1
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Inventors:
Mitsuhiro Takeuchi
Hiroto Yasue
Hiroto Yasue
Application Number:
JP2016154490A
Publication Date:
May 13, 2020
Filing Date:
August 05, 2016
Export Citation:
Assignee:
CKD Corporation
International Classes:
F16K7/12; F16K27/00
Domestic Patent References:
| JP2006200629A | ||||
| JP2003343753A | ||||
| JP62185989U | ||||
| JP2005135810A |
Attorney, Agent or Firm:
Tsuyoshi Yamada
Hiroshi Matsuda
Hiroshi Matsuda