Title:
FLUID MIXING DEVICE
Document Type and Number:
Japanese Patent JP3702097
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent dust production due to the mixture of liquids and to mix the liquids accurately at a specific mixing ratio when washing liquid for washing, for example, a semiconductor wafer is produced by mixing different kinds of liquids.
SOLUTION: A semipermeable membrane 43 that permeates liquid when pressure is applied is provided at the confluence position 42 of a subordinate flow passage 41 flows into a main flow passage 40 so that the flow passage 41 is blocked, and a pressure applying means 5 is provided which applies pressure to the liquid in the subordinate flow passage 41. The pressure applying means 5 applies a pressure to the liquid in the flow passage 41 to make the liquid in the flow passage 41 permeate the semipermeable membrane 43 and then flow in the main flow passage 40.
Inventors:
Nobuo Konishi
Application Number:
JP16418998A
Publication Date:
October 05, 2005
Filing Date:
May 27, 1998
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G05D11/02; (IPC1-7): G05D11/02
Domestic Patent References:
| JP4156929A | ||||
| JP10116811A | ||||
| JP10070101A |
Attorney, Agent or Firm:
Toshio Inoue
Mizuno Hiromi
Mizuno Hiromi