Title:
流体圧力検出装置
Document Type and Number:
Japanese Patent JP7088166
Kind Code:
B2
Abstract:
A fluid pressure detection device capable of accurately detecting a pressure change of a fluid flowing inside a tube includes a substrate, a piezoelectric element formed on the top surface of the substrate, a support body which is annular and surrounds the piezoelectric element and supports the top surface of the substrate, and a lid body which is provided to close the top opening of the support body, and deforms the tube with the bottom surface of the substrate by pressing the substrate through the support body.
Inventors:
Mutsuko Nakano
Ken Unno
Tomohiro Moriki
Ken Unno
Tomohiro Moriki
Application Number:
JP2019509112A
Publication Date:
June 21, 2022
Filing Date:
March 06, 2018
Export Citation:
Assignee:
tdk Corporation
International Classes:
G01L9/08; A61B5/022; G01L7/00
Domestic Patent References:
| JP2002224064A | ||||
| JP201483092A |
Foreign References:
| US20070000333 | ||||
| US20030009105 |
Attorney, Agent or Firm:
Takashi Murai
Hiromi Murai
Hiromi Murai
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