To provide a fluid pressure regulator that is low in cost, can save space and obviates the installation of an external control part.
The fluid pressure regulator 20 is comprised of a program control part 40, PID control part 46, second PID control part 44, drive control part 38, air supply solenoid valve 34, exhaust solenoid valve 36, diaphragm 30, main valve 24 and pressure sensor 32. Based on a desired setting valve inputted from an external and/or a desired program, the fluid pressure regulator regulates the pressure or flow rate of a fluid discharged from the main valve 24. Moreover, a detection mechanism 42 is provided on a controlled object 22 to feed back the controlled variable of the controlled object 22 from the detection mechanism 42.
INAYAMA NAOTO
TOHO AKIRA
