Title:
液浸リソグラフィのための流体の供給装置及び方法
Document Type and Number:
Japanese Patent JP5338791
Kind Code:
B2
Inventors:
Alex Curtim Poon
Leonardo Wyfang Co
Leonardo Wyfang Co
Application Number:
JP2010255404A
Publication Date:
November 13, 2013
Filing Date:
November 15, 2010
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G02B21/00; G03B27/52; G03F7/20; G03F
Domestic Patent References:
| JP2005045223A | ||||
| JP2005019864A | ||||
| JP2004320016A |
Foreign References:
| WO1999049504A1 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi
Tadashi Takahashi
Kazuya Nishi