PURPOSE: To allow fluid fed from a fluid vibration detecting hole to flow to a microflow sensor at a flowing velocity as it is and to improve sensitivity of the sensor by forming sectional areas of the hole and a channel.
CONSTITUTION: A fluid vibration detector 9 comprises a channel 8 and fluid vibration detecting holes 7, 7 formed to have the same sectional areas, and a microflow sensor 10 assembled in the channel 8. When a differential pressure based on fluid vibration is generated between left and right fluid vibration detecting holes 7 and 7a, a flow occurs in the channel 8. A change of the flow velocity is detected by the sensor 10, and an electric signal from the sensor 10 is sent to a side of a flow rate calculator 12. The flow rate calculated by the calculator 12 is displayed on a flow rate display circuit 14.
SAKAI KATSUTO
NAGANUMA TETSUO
SATO SHINICHI
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