Title:
フッ素化された分子並びに、その製造及び使用法
Document Type and Number:
Japanese Patent JP2005518476
Kind Code:
A
Abstract:
Provided are polymers derived from fluoroalkyl norbornenes, fluorinated crotonates, fluorinated allyl alcohols, and combinations of two or more thereof for use in a wide variety of applications, including photoresist compositions. Also provided are methods for producing the fluoroalkyl norbornenes, fluorinated crotonates, and fluorinated allyl alcohols for use in the present polymers.
Inventors:
POS, Andrew
Nail Wadek, David
Demin, Timothy Earl
Nair, Harida Sankei
Nail Wadek, David
Demin, Timothy Earl
Nair, Harida Sankei
Application Number:
JP2003571798A
Publication Date:
June 23, 2005
Filing Date:
February 21, 2003
Export Citation:
Assignee:
Honeywell International Inc.
International Classes:
C07C29/147; C07C67/307; C07C67/317; C07C67/343; C08F16/04; C08F20/10; C08F20/22; C08F32/00; C08F32/08; C08G61/06; C08G61/08; G03F7/004; G03F7/039; H01L21/027; (IPC1-7): C08F32/00; C08F16/04; C08F20/22; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Okimoto Kazuaki
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Okimoto Kazuaki