Title:
フッ素化ポリマー
Document Type and Number:
Japanese Patent JP2006511628
Kind Code:
A
Abstract:
Provided are polymers derived from bridged heterocyclic compounds, fluorinated norbornene compounds, fluorinated alkenes, heterocyclic compounds, and combinations of two or more thereof for use in a wide variety of applications, including photoresist compositions. Also provided are methods for producing the monomer compounds for use in the present polymers.
Inventors:
Nair, Harida Sankei
Van der Puy, Michael
POS, Andrew Jay
Neillen Wadek, David
Van der Puy, Michael
POS, Andrew Jay
Neillen Wadek, David
Application Number:
JP2004503516A
Publication Date:
April 06, 2006
Filing Date:
May 07, 2003
Export Citation:
Assignee:
Honeywell International Inc.
International Classes:
C08F34/00; C07B37/12; C07C17/16; C07C17/30; C07C22/02; C07C33/42; C07C33/44; C07C43/192; C07C67/343; C07C67/347; C07C69/753; C07D487/08; C07D493/08; C08F8/18; C08F16/04; C08F20/22; C08F32/08; C08F34/02; C08G61/08; G03F7/004; G03F7/039
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Okimoto Kazuaki
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Okimoto Kazuaki