Title:
フッ素系環状化合物、フッ素系重合性単量体、フッ素系高分子化合物並びにそれを用いたレジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP4557502
Kind Code:
B2
Abstract:
A fluorine-containing cyclic compound is represented by the formula 1:wherein each of R1, R2 and R3 independently represents a hydrogen, alkyl group, fluorine, fluoroalkyl group or hexafluorocarbinol group,wherein at least one of the hexafluorocarbinol groups may partly or totally be protected with a protecting group, andwherein the protecting group is (a) a straight-chain, branched or cyclic hydrocarbon group having a carbon atom number of 1-25 or (b) an aromatic hydrocarbon group and optionally contains a fluorine atom, oxygen atom, nitrogen atom or carbonyl bond.
Inventors:
Haruhiko Komoriya
Satoru Miyazawa
Kawamura Katsunori
Satoru Kobayashi
Kazuhiko Maeda
Satoru Miyazawa
Kawamura Katsunori
Satoru Kobayashi
Kazuhiko Maeda
Application Number:
JP2003135228A
Publication Date:
October 06, 2010
Filing Date:
May 14, 2003
Export Citation:
Assignee:
Central Glass Co., Ltd.
International Classes:
C07C33/44; C07C35/29; C07C35/52; C07C43/196; C07C69/533; C07C69/54; C07C69/653; C08F32/02; C08G61/08; G03F7/004; G03F7/039
Domestic Patent References:
| JP2003192737A | ||||
| JP5080515A | ||||
| JP2001166479A | ||||
| JP2001296662A | ||||
| JP2001316425A | ||||
| JP2002201219A | ||||
| JP2002255875A | ||||
| JP2003021904A |
Foreign References:
| WO2003006413A1 | ||||
| WO2003007080A1 | ||||
| US6013413 |
Other References:
Proceedings of SPIE-The International Society for Optical Engineering (Pt. 1, Advances in Resist Technology and Processing XVII),2000年,Vol.3999,p.365-374
Proceedings of SPIE-The International Society for Optical Engineering (Pt. 1, Advances in Resist Technology and Processing XVIII),2001年,Vol.4345,p.350-360
Journal of Photopolymer Science and Technology,2001年,Vol.14,p.603-611
Journal of Photopolymer Science and Technology,2002年,Vol.15,p.559-568
Proceedings of SPIE-The International Society for Optical Engineering (Pt. 1, Advances in Resist Technology and Processing XVIII),2001年,Vol.4345,p.350-360
Journal of Photopolymer Science and Technology,2001年,Vol.14,p.603-611
Journal of Photopolymer Science and Technology,2002年,Vol.15,p.559-568
Attorney, Agent or Firm:
Makoto Koide