Title:
含フッ素化合物分解装置およびこれを利用した含フッ素化合物処理システム
Document Type and Number:
Japanese Patent JP4409203
Kind Code:
B2
Abstract:
The apparatus for decomposing PFCs includes an external electrode unit which is coupled to a reference voltage and which defines a flow space for the flow of the PFCs, and an internal electrode unit which is located within the flow space of the external electrode unit so as to define a reaction space between the internal electrode unit and the external electrode unit. The apparatus is also equipped with a voltage supply unit which applies an alternating voltage to the internal electrode unit which is of sufficient voltage and frequency to generate an electron beam within the reaction space which is capable of decomposing the PFCs.
Inventors:
Cai Katsuki
Li Sou
Lee Jinju
Lee Kyou Megumi
Lee Long
Zheng Zhen Jade
Application
Li Sou
Lee Jinju
Lee Kyou Megumi
Lee Long
Zheng Zhen Jade
Application
Application Number:
JP2003123806A
Publication Date:
February 03, 2010
Filing Date:
April 28, 2003
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO.,LTD.
International Classes:
B01D53/68; B01D53/32; B01D53/70; B01J19/12; C07B35/06; C07B37/06; H01L21/02
Domestic Patent References:
| JP2001054721A | ||||
| JP54039393A | ||||
| JP2001269539A | ||||
| JP58043189A | ||||
| JP4322718A | ||||
| JP11156156A | ||||
| JP10094715A | ||||
| JP2000042349A |
Attorney, Agent or Firm:
Mikio Hatta
Atsushi Nogami
Yasuo Nara
Etsuko Saito
Katsuyuki Utani
Atsushi Nogami
Yasuo Nara
Etsuko Saito
Katsuyuki Utani