Title:
フッ素含有化合物ガスの処理装置および処理方法
Document Type and Number:
Japanese Patent JP4873147
Kind Code:
B2
Inventors:
Masao Miura
Tokuura Shizuo
Takashi Yoshida
Norimichi Minemura
Tetsuro Shimano
Tokuura Shizuo
Takashi Yoshida
Norimichi Minemura
Tetsuro Shimano
Application Number:
JP2006310041A
Publication Date:
February 08, 2012
Filing Date:
November 16, 2006
Export Citation:
Assignee:
Ube Industries,Ltd.
International Classes:
B01D53/86; C07B35/06; C07B37/06; C07C19/08
Domestic Patent References:
| JP10015348A | ||||
| JP2001054723A | ||||
| JP2003305337A | ||||
| JP2001224926A | ||||
| JP2003247712A |
Attorney, Agent or Firm:
Katsuhiro Ito
Akiko Ono
Akiko Ono