Title:
含フッ素共重合体とその製造方法およびそれを含むレジスト組成物
Document Type and Number:
Japanese Patent JPWO2005108446
Kind Code:
A
Inventors:
Osamu Yokokoji
Yoko Takebe
Masataka Eda
Yoko Takebe
Masataka Eda
Application Number:
JP2005008361W
Publication Date:
November 17, 2005
Filing Date:
May 06, 2005
Export Citation:
Assignee:
Asahi Glass Co., Ltd.
International Classes:
G03F7/039; H01L21/027; C08F222/10; C08F236/20
Attorney, Agent or Firm:
Haruko Miwa
Mochitoshi Watanabe
Mochitoshi Watanabe