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Title:
FLUORINE-CONTAINING POLYMER AND PHOTOSENSITIVE COATING MATERIAL
Document Type and Number:
Japanese Patent JP2003137939
Kind Code:
A
Abstract:

To provide a new polymer which has a high fluorine content, can have polar groups in the same molecule, and can form films having high adhesiveness to substrates, to provide an anti-reflective material coated with the polymer, and to provide a photosensitive coating material or resist material.

This fluorine-containing polymer comprises ≥60 mol.% of a structure originated from a norbornene compound having a specific structure and ≥0.1 mol.% of repeating units originated from a compound containing two polymerizable unsaturated bonds in the molecule.


Inventors:
KOGA SUNAO
MAEDA KAZUHIKO
Application Number:
JP2001339981A
Publication Date:
May 14, 2003
Filing Date:
November 05, 2001
Export Citation:
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Assignee:
CENTRAL GLASS CO LTD
International Classes:
G03F7/039; C07C33/44; C07C61/40; C07C69/653; C08F220/10; C08F220/20; C08F220/22; C08F222/06; C08F232/04; C08F232/08; (IPC1-7): C08F232/04; C07C33/44; C07C61/40; C07C69/653; C08F220/10; C08F220/20; C08F220/22; C08F222/06; C08F232/08; G03F7/039
Attorney, Agent or Firm:
Yoshiyuki Nishi