To provide a fluorine-gas-forming apparatus which works with high safety and reliability even in a long period of an operation.
The fluorine-gas-forming apparatus 30 has an electrolysis tank 32 which generates a product gas containing fluorine gas as a main component in a first gas phase section in an anode side, and generates a byproduct gas containing hydrogen gas as a main component in a second gas phase section in a cathode side. First and second pipes 52 and 72 are arranged so as to lead the product gas and the byproduct gas. The first pipe 52 is provided with a first valve 56 for controlling the flow rate of the gas, the opening degree of which is adjusted on the basis of the information which directly or indirectly shows the condition inside the electrolysis tank 32. The first pipe 52 is also provided with a first cartridge 54 in upstream of the first valve 56. The first cartridge 54 contains the pellet of sodium fluoride, which absorbs hydrogen fluoride and the mist of a molten salt getting in the product gas.
COPYRIGHT: (C)2005,JPO&NCIPI
Atsushi Sonobe
AIR LIQUIDE KOREA SERVICES Co., Ltd.
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Makoto Nakamura
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