Title:
FOAMED BODY FOR POLISHING
Document Type and Number:
Japanese Patent JP2004223654
Kind Code:
A
Abstract:
To provide a foamed body for polishing suitable as a polishing pad to be used for surface-flattening of a device wafer of a semiconductor of an inter-layer insulating film and a metal wiring, etc., capable of realizing polishing equal to or more than that of a conventional pad and having high wear resistance.
In this foamed body for polishing, wear amount by a wear test according to JIS K 7311 prepared by making gas under ordinary temperature and ordinary pressure as foaming agent is taken as 50 to 250 mg. Especially, it is desirable that apparent compacting ratio is 3 to 15% at 25°C. A main raw material of the foamed body is desirably a thermoplastic elastomer such as polyurethane.
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Inventors:
MASAKI YOSHINORI
Application Number:
JP2003015033A
Publication Date:
August 12, 2004
Filing Date:
January 23, 2003
Export Citation:
Assignee:
SUMITOMO BAKELITE CO
International Classes:
B24B37/20; B24B37/24; H01L21/304; (IPC1-7): B24B37/00; H01L21/304
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