To perform cross-sectional processing observation which enables observing a cross-section of an observation object structure, including a sample having a periodic structure.
A focused ion beam device includes a focused ion beam irradiation system 1 irradiating the sample 5 with a focused ion beam 3; a charged particle beam irradiation system 2 irradiating a focused ion beam irradiation region on the sample 5 with a charged particle beam 4; a secondary charged particle detector 7a detecting secondary charged particles to be generated from the sample 5; and a processing mechanism 11 sending an irradiation signal of the focused ion beam 3 creating cross-sections at different cross-section intervals to the focused ion beam irradiation system 1.
COPYRIGHT: (C)2011,JPO&INPIT
Junichi Tashiro
Keiichi Tanaka
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