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Patent Searching and Data


Title:
FORCE DETECTION DEVICE
Document Type and Number:
Japanese Patent JP2003083804
Kind Code:
A
Abstract:

To provide a force detection device not utilizing a capacity change.

This force detection device 1 is equipped with a hard thin magnetic membrane 6 arranged on a substrate 4. An MR thin membrane 7 is arranged on the substrate 4 so that the MR thin membrane 7 is under the influence of a magnetic field generated from the hard thin magnetic membrane 6. A cantilever member 3 is mounted so as to vibrate corresponding to the vibration force. The magnetic field functioning on the MR thin membrane 7 is vibrated by vibration of the cantilever member 3, and the electric characteristic of the MR thin membrane 7 is vibrated and changed by the vibration of the magnetic field. The vibration change of the electric characteristic corresponds to the vibration of the cantilever member 3.


Inventors:
TAKADA AKIO
Application Number:
JP2002156143A
Publication Date:
March 19, 2003
Filing Date:
May 29, 2002
Export Citation:
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Assignee:
SONY ELECTRONICS SINGAPORE PTE
International Classes:
G01H11/04; H03H9/02; H03H9/24; H03H9/46; H04R23/00; (IPC1-7): G01H11/04; H04R23/00
Attorney, Agent or Firm:
Akira Koike (2 outside)