Title:
FOREIGN OBJECT DETECTION DEVICE AND FOREIGN OBJECT DETECTION METHOD
Document Type and Number:
Japanese Patent JP2022134358
Kind Code:
A
Abstract:
To provide a novel method that identifies a foreign object position.SOLUTION: A foreign object detection device comprises: an electromagnetic wave generation unit that emits an electromagnetic wave from a point light source; a rotation holding unit that holds an examination object, and rotates the examination object around a rotation axis; a detection unit that detects the electromagnetic wave transmitting through the examination object; a trajectory extraction unit that extracts a trajectory of a foreign object of the examination object in rotation image data on the examination object generated by detecting the electromagnetic wave transmitting through the examination object in a state where the examination object is rotated around the rotation axis, and calculates coordinates of a center (C2) of a circle including the trajectory; and a foreign object position specification unit that specifies a position in a rotation axis direction of the foreign object on the basis of the coordinates of the center (C2).SELECTED DRAWING: Figure 1
Inventors:
SHIMAMOTO KENTA
Application Number:
JP2021033432A
Publication Date:
September 15, 2022
Filing Date:
March 03, 2021
Export Citation:
Assignee:
RIGAKU DENKI CO LTD
International Classes:
G01N23/04; G01N21/89
Attorney, Agent or Firm:
Hiroshi Kobayashi
Norio Omori
Tsuyoshi Arai
Yasuhito Suzuki
Norio Omori
Tsuyoshi Arai
Yasuhito Suzuki
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