Title:
FORMATION OF COMPOSITE HARD FILM WITH LOW COEFFICIENT OF FRICTION
Document Type and Number:
Japanese Patent JP3918895
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prepare a composite hard film capable of reducing the coefficient of friction of the surface of a hard product having a sliding part and improving an energy-saving effect.
SOLUTION: In this method for forming a composite hard film of low coefficient of friction, hydrocarbon gas is supplied in the course between the latter half and the vicinity of completion of a process where a hard film is formed on a substrate by the PVD method using plasma. The hard film is one or ≥2 kinds selected from nitride film, carbide film, and oxide film, and hydrocarbon gas is supplied in the course between the latter lalf and the vicinity of completion of a process where an Al-Cr-N type composite hard film is formed on a substrate by the PVD method using plasma.
Inventors:
Yukio Ide
Application Number:
JP31450798A
Publication Date:
May 23, 2007
Filing Date:
November 05, 1998
Export Citation:
Assignee:
Yamaguchi Prefecture
International Classes:
B23P15/28; C23C14/06; C23C14/34; C23C16/26; C23C28/04; (IPC1-7): C23C14/06; B23P15/28; C23C14/34; C23C16/26; C23C28/04
Domestic Patent References:
| JP3069830A | ||||
| JP10130865A | ||||
| JP10094905A | ||||
| JP10025566A | ||||
| JP7237010A | ||||
| JP11335813A |
Attorney, Agent or Firm:
Yukio Murata