Title:
FORMATION OF DIAMOND LIKE CARBON FILM ON RUBBER OR RESIN
Document Type and Number:
Japanese Patent JP3791060
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a member low in friction, having a long service life and easy to operate in such a manner that the characteristics of a rubber or resin base material are put to practical use by irradiating the base material with ultraviolet rays or electron beams, thereafter bringing gaseous hydrocarbon into vapor phase reaction and forming diamond like carbon film.
SOLUTION: A soft rubber or resin base material enough in resiliency and calcinability is irradiated with ultraviolet rays and/or electron beams. In this way, the surface of the base material is cross-linked with high polymers, and furthermore, unbonded carbon atoms are numerously formed and dispersed therein. Then, this surface is preferably exposed to the plasma of a fluorine-contg. gas or a gaseous hydrogen and is coated, by which the unbonded carbon atoms are protected from contamination caused by impurities. After that, gaseous hydrocarbon is fed thereto as the raw material, which is excited, and vapor phase reaction is allowed to occur. This vapor phase reaction is executed by a plasma CVD process, an ion plating process, a sputtering process or the like in such a manner that methane or the like and a carrier gas are fed to the base material while it is cooled. Thus, the hard diamond like carbon film to which the unbonded carbon atoms are bonded and excellent in wear resistance is formed with tight adhesion.
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Inventors:
Takahiro Middle East
Doi Yo
Doi Yo
Application Number:
JP22745696A
Publication Date:
June 28, 2006
Filing Date:
August 08, 1996
Export Citation:
Assignee:
Nissin Electric Co., Ltd.
International Classes:
C08J7/00; C23C16/02; C08J7/06; C23C16/26; C23C16/27; C30B29/04; (IPC1-7): C23C16/02; C08J7/00; C08J7/06; C23C16/26; C30B29/04
Domestic Patent References:
| JP1306567A | ||||
| JP61146791A | ||||
| JP1188675A | ||||
| JP6088209A | ||||
| JP60190557A |
Attorney, Agent or Firm:
Shigeki Kawase