Title:
FORMATION OF FILM OF LIQUID MATERIAL ON SUBSTRATE AND APPARATUS THEREFOR
Document Type and Number:
Japanese Patent JPH1157596
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To form film without centrifually spreading liquid material on a substrate. SOLUTION: The liquid material is delivered at a specified rate to a transfer pad 6 from a liquid material tank 7 and this transfer pad 6 is impregnated with the specified amt. of the liquid material. The substrate 3 is positioned on a transfer stage 1 and the transfer stage 1 is risen by a transfer stage elevating mechanism 8, by which the substrate 3 is pressed under specified pressure to the transfer pad 6. A transfer stage rotating motor 9 is rotated after the pressing. The transfer stage 1 is lowered by the transfer stage elevating mechanism 8 after the rotation. A transfer table 5 is moved onto a screening stage 2 by a transfer table moving motor 4. A squeegee 11 is driven by a squeegee moving mechanism 10, by which the squeegee 11 is rubbed and moved on the surface of the transfer pad 6 and the dust sticking to the surface of the transfer pad 6 is scraped off. The transfer table 5 is moved onto the transfer stag 1 by the transfer table moving motor 4 after the completion of the movement of the squeegee 11.
Inventors:
UCHIDA TAKUYA
KOBAYASHI SHINJI
MURAYAMA NOBORU
KOBAYASHI SHINJI
MURAYAMA NOBORU
Application Number:
JP24050197A
Publication Date:
March 02, 1999
Filing Date:
August 20, 1997
Export Citation:
Assignee:
RICOH KK
International Classes:
B05D1/40; B05C11/08; G11B5/84; G11B7/26; H01L21/027; (IPC1-7): B05D1/40; G11B5/84; G11B7/26