PURPOSE: To obtain an oxide film having good quality by introducing a metallic element, compd. having an alkoxy group or alkyl group, oxygen or compd. contg. oxygen and active seed into a film forming space and forming the oxide film.
CONSTITUTION: The compd. A expressed by the formula I or the compd. B expressed by the formula II, oxygen or the compd. contg. oxygen and active 0seed are introduced into the film forming space and the oxide film is deposited. In the formula I, the formula II, M, M'; metallic element, R; an alkyl group, m; the positive integer equal to the valency of M or the integer times of said valency, n; the positive integer equal to the valency of M' or the integer times of said valency. The compd. contg. oxygen is alcohols R-OH (R; an alkyl group of 1W4C) and the active seed is a hydrogen radial.
OSADA YOSHIYUKI
ODA TOSHIMICHI
SHIMIZU ISAMU
