To obtain a soft magnetic alloy film, which has a wear resistance peculiar to an nitride film and a specific resistance higher than that of a metal alloy film and can maintain a high saturation magnetization without impairing its magnetism, by a method wherein when the magnetic alloy film is formed using an alloy target by a sputtering method, N2 gas is periodically mixed in Ar sputtering gas.
Layers of a composition which is shown by a formula TXMYNZ, and layers of a composition which is shown by a formula TX', MY', are alternately stacked by mixing periodically N2 gas in Ar sputtering gas to form the layers into a multilayered and to obtain a soft magnetic alloy film. In an alloy target and the respective compositions of both layers of the layers of the composition shown by the formula TXMYNZ, and the layers of the composition shown by the formula TX'MY', the T shows one kind of a metal which contains Fe and the like as its main components and is selected from between the Fe and the like, the M shows one kind of a metal selected from a group of Nb and the like, the N is N(nitrogen), (x), (y), (z), (x') and (y') respectively show an atomic % and (x), the (y), (z), (x') and (y') are respectively applied on the conditions of 75≤x<94, 6≤y<25, 0.1≤z<20, x+y+z=100, 75≤x'<94, 6≤y'<25 and x'+y'=100.
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KUGIMIYA KOICHI
KOMATA YUJI
