PURPOSE: To stably form a thin film on a large-sized substrate or on a large number of traveling substrates while keeping uniformity in the width direction and especially on a large-sized panel, flat panel, etc., by continuously transferring the substrate in a thin film deposition zone, measuring the film thickness distribution in the width direction at the intermediate point and feedback- controlling the final film thickness to be attained.
CONSTITUTION: A first sensor 41 for detecting the thickness of a thin film is provided above a first vaporization source 21, and a second sensor 43 for detecting the thickness of the thin film is furnished above a second vaporization source 23. A third sensor 45 for detecting the thickness of the thin film is provided at the intermediate point between the first and second sensors. The thickness distribution of the thin film in the direction orthogonal to the traveling direction of the substrate is made uniform, based on the measured values from the sensors, and the final thickness of the film to be formed on the substrate is controlled.
MATSUMOTO SHIGEJI
ZAISHO SHINICHIRO
