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Title:
FORMING METHOD OF P-TYPE ZNSE ELECTRODE
Document Type and Number:
Japanese Patent JPH06181339
Kind Code:
A
Abstract:

PURPOSE: To lessen a barrier between a P-type ZnSe layer and an electrode by a method wherein a Te thin film layer is formed on the P-type ZnSe layer, and an Au layer is formed on the Te thin film, which is thermally treated.

CONSTITUTION: A P-type ZnSe layer 2 which contains nitrogen as acceptor is formed of Zn and Se as materials on a GaAs substrate 1 through a molecular beam epitaxial growth method making use of N2 radical as dopant material. In succession, a Te thin film 3 and an Au layer 4 are formed on the; P-type ZnSe layer 2 in this sequence through a vacuum evaporation method, then the GaAs substrate 1 is subjected to an annealing process in an atmosphere of hinny gas (mixed gas of H2 and N2 in the volume ratio 1:10), and electrodes 5a and 5b are formed. By this setup, a barrier between the P-type ZnSe layer 2 and the electrodes 5a and 5b can be lessened.


Inventors:
HISHIDA YUJI
Application Number:
JP33421592A
Publication Date:
June 28, 1994
Filing Date:
December 15, 1992
Export Citation:
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Assignee:
SANYO ELECTRIC CO
International Classes:
H01L21/28; H01L33/28; H01L33/30; H01L33/40; (IPC1-7): H01L33/00; H01L21/28
Attorney, Agent or Firm:
Takuji Nishino