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Title:
FREEZE VACUUM DRYING APPARATUS
Document Type and Number:
Japanese Patent JP2000088461
Kind Code:
A
Abstract:

To provide a freeze vacuum drying apparatus which can maintain the inside of a vacuum drying chamber in a sterilized state for a long period and which is excellent in operation efficiency and can be manufactured inexpensively.

In an apparatus wherein the inside of a vacuum drying chamber 1 holding a material 8 to be dried is vacuum-pumped by an evacuation device 3 connected to the chamber so as to subject this material 8 to freeze vacuum drying, the surface of the vacuum drying chamber exposed inside the chamber is covered with a thin film 14 of a titanium oxide and light sources 15 which irradiate the thin film 14 and make it act for sterilization by photolysis are provided. For these light sources 15, light sources casting ultraviolet light of a wavelength 400 nm or below are provided and the light sources 15 or reflectors are provided in a plurality so that many dark parts may not be brought about in the vacuum drying chamber 1.


Inventors:
FUJISHIMA AKIRA
NAKAMURA KYUZO
NEGISHI TOSHIO
MOMONO TAKESHI
Application Number:
JP26508598A
Publication Date:
March 31, 2000
Filing Date:
September 18, 1998
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
B01J3/00; F26B5/06; F26B25/12; (IPC1-7): F26B25/12; B01J3/00; F26B5/06
Domestic Patent References:
JPH09152268A1997-06-10
JPS63207978A1988-08-29
JPH09192078A1997-07-29
Attorney, Agent or Firm:
Kinichi Kitamura (3 others)