Title:
FUNCTION ELEMENT, ACCELERATION SENSOR, AND SWITCH
Document Type and Number:
Japanese Patent JP2015123526
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a function element capable of realizing the miniaturization and the voltage-lowering while retaining an impact resistance.SOLUTION: A function element (an MEMS device) comprises: a base plate; and a movable part held on the base plate and made movable along a first direction in the substrate face. The movable part has a plurality of first axial parts having a relatively high rigidity, and the first axial parts are arranged to extend individually along a first direction and in parallel for axial symmetry. On the substantial extensions of the first axial parts, there are provided protrusions for braking the movable parts.
Inventors:
AKIBA AKIRA
HASHIMOTO MITSUO
FUKUYAMA MUNEKATSU
HASHIMOTO MITSUO
FUKUYAMA MUNEKATSU
Application Number:
JP2013268870A
Publication Date:
July 06, 2015
Filing Date:
December 26, 2013
Export Citation:
Assignee:
SONY CORP
International Classes:
B81B3/00; G01P15/125; H01L29/84
Attorney, Agent or Firm:
Patent Business Corporation Tsubasa International Patent Office
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