Title:
機能性薄膜及びその製造方法
Document Type and Number:
Japanese Patent JP5099321
Kind Code:
B2
Inventors:
Ishihara Mari
Application Number:
JP2007206327A
Publication Date:
December 19, 2012
Filing Date:
August 08, 2007
Export Citation:
Assignee:
Hyogo prefecture
International Classes:
G03C1/73; C09K9/02
Domestic Patent References:
| JP63163341A | ||||
| JP63234083A | ||||
| JP2006293209A | ||||
| JP2264246A | ||||
| JP5127303A |
Attorney, Agent or Firm:
Patent business corporation Yuko patent office