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Title:
検出器システムのための機能化された導波路
Document Type and Number:
Japanese Patent JP7447130
Kind Code:
B2
Abstract:
A functionalized waveguide for a detector system includes an incoupling region of a main body that deflects only part of the radiation coming from an object to be detected and impinges on the front face such that the deflected part propagates as coupled-in radiation in the main body by reflections up to the decoupling region and impinges on the decoupling region. A decoupling region deflects at least part of the coupled-in radiation impinging thereon such that the deflected part exits the main body via the front or rear face to impinge on the detector system. The extent of the incoupling region in a second direction transverse to the first direction is greater than the extent of the decoupling region in the second direction. In the second direction, the incoupling region has at least two different diffractive incoupling structures which have a different deflection component in the second direction.

Inventors:
Klein Deanst, Roman
Eller, Christoph
Voitisek, Petr
Junghans, Marc
Tomae, Daniel
REIT Muller, Mirco
Burghard, Machias
Gut, Alexander
Lutz, Andreas
Application Number:
JP2021544289A
Publication Date:
March 11, 2024
Filing Date:
January 31, 2020
Export Citation:
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Assignee:
Carl Zeiss Jena GmbH
International Classes:
G02B6/00; G02B5/18; G02B5/32; G02B6/124; G02B6/34; G02B6/42; G03B11/00; G03B15/00; G03H1/24; H04N23/55
Domestic Patent References:
JP7272311A
JP2017520764A
JP8507879A
Foreign References:
US20180292676
US20160139402
DE102010041349A1
CN108681067A
WO2015139761A1
US20160209657
US20170299865
Attorney, Agent or Firm:
Michiharu Soga
Jun Kajinami
Keisuke Nakao