Title:
The Galvano scanner control device and a laser beam machining device
Document Type and Number:
Japanese Patent JP6034208
Kind Code:
B2
Inventors:
Daisuke Matsuke
Mikio Tokuyama
Takanori Mori
Akihiro Yamamoto
Mikio Tokuyama
Takanori Mori
Akihiro Yamamoto
Application Number:
JP2013017891A
Publication Date:
November 30, 2016
Filing Date:
January 31, 2013
Export Citation:
Assignee:
Via Mechanics, Ltd.
International Classes:
G02B26/10
Domestic Patent References:
| JP2006134253A | ||||
| JP2007272011A | ||||
| JP2006235414A | ||||
| JP2007293796A | ||||
| JP2008228524A |
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