Title:
ガントリーステージの制御方法及び制御装置
Document Type and Number:
Japanese Patent JP7360124
Kind Code:
B2
Abstract:
To provide a gantry stage control method and control device on the basis of an NCTF control method that enables high-accuracy and high-speed positioning without requiring special knowledge about control theory with easy design flow and controller adjustment.SOLUTION: Due to NCTF control based on a reference characteristic locus obtained from an open loop experiment using an input signal to a linear motor when positioning with a gantry stage where a table is installed on a surface plate via two linear motors arranged in parallel, the two linear motors are independently controlled to cause the table to follow the vibration caused by the surface plate and suppress the high frequency vibration generated in a process of causing the table to follow the vibration of the surface plate.SELECTED DRAWING: Figure 10
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Inventors:
Kaiji Sato
Kaoru Akamatsu
Kaoru Akamatsu
Application Number:
JP2019166410A
Publication Date:
October 12, 2023
Filing Date:
September 12, 2019
Export Citation:
Assignee:
Toyohashi University of Technology
Proterial Co., Ltd.
Proterial Co., Ltd.
International Classes:
H02P5/46; G05B11/32; G05B11/36; G05D3/00
Domestic Patent References:
| JP2001022448A |
Other References:
佐藤海二,外2名,”2慣性系のための実用的な位置決め制御方法と制御性能”,2002年度精密工学会秋期大会学術講演会講演論文集 p.245
Attorney, Agent or Firm:
Hidehito Kono
Norio Kawano
Norio Kawano