GAS AMPLIFICATION TYPE X-RAY IMAGING DETECTOR AND GAS AMPLIFICATION TYPE X-RAY IMAGING DETECTION METHOD

Japanese Patent JP3785501

B2

PROBLEM TO BE SOLVED: To provide a gas amplification type X-ray imaging detector allowing stable gas amplification, having a high position resolution and hardly damaged by electric discharge, and a gas amplification type X-ray imaging detecting method.
SOLUTION: This gas amplification type X-ray imaging detector 1 is composed of a micro gas chamber 2 causing electron doubling and electric discharge between an anode 11 and a cathode 12 with electrons generated by the collision of radiation photon and inert gas, as seeds, and a detecting means 3 for detecting the electrons amplified by the micro gas chamber 2. The micro gas chamber 2 is formed of X-ray lithography by laminating substrates 13, 14 with a plurality of through holes 5 and conductive materials to be the anode 11 or cathode 12 on both faces, in the adjusted state of the through holes 5 and installing them on a glass substrate with a fluorescent material 15, or the fluorescent material 15 and a fluorescent material burning protective film 26 formed on the surface. The part emitting light by the collision of the electrons amplified by the micro gas chamber, against the fluorescent material is directly detected by the detecting means 3.

Tadashi Hattori
Kazumichi Sato

JP2001350386A

June 14, 2006

November 15, 2001

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New Industry Creation Research Institute

G01T1/18; G01T1/20; H01J31/49; H01J47/06; H01L27/14; (IPC1-7): G01T1/18; G01T1/20; H01J31/49; H01J47/06; H01L27/14

JP2001508935A
JP10501622A
JP2000206252A
JP11111614A
JP2000218655A
JP2000271913A
JP2001155668A
JP5225933A

WO1996017373A1

Yoshiyuki Kaji
Makoto Suhara

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