Title:
逆マグネトロン源によるガス分析
Document Type and Number:
Japanese Patent JP6964202
Kind Code:
B2
Abstract:
A total pressure cold cathode ionization gauge is disclosed. An inverted magnetron electrode design is capable of simultaneously detecting and measuring total gas pressure in a high vacuum system, along with partial pressures of one or more gases, such as hydrogen, helium and water. In addition, a leak detector, such as a helium leak detector, is disclosed with a compact counterflow arrangement of a gas inlet passage to an ion detection passage.
Inventors:
Blacker Gerald A.
Swinnie Timothy Sea
Percy Clinton El
Swinnie Timothy Sea
Percy Clinton El
Application Number:
JP2020566591A
Publication Date:
November 10, 2021
Filing Date:
May 21, 2019
Export Citation:
Assignee:
MKS INSTRUMENTS,INCORPORATED
International Classes:
H01J41/06; G01L21/34; G01N27/62; H01J49/00; H01J49/02; H01J49/04; H01J49/06; H01J49/10; H01J49/30; H01J49/40; H01J49/42
Domestic Patent References:
| JP4505828A | ||||
| JP2007517233A | ||||
| JP2008209181A |
Attorney, Agent or Firm:
Shuji Sugimoto
Kenro Tsutsumi
Yuka Kobayashi
Kenichi Nakata
Daisuke Kaneko
Hiroki Taniguchi
Shinji Nakao
Takashi Sasanuma
Kenro Tsutsumi
Yuka Kobayashi
Kenichi Nakata
Daisuke Kaneko
Hiroki Taniguchi
Shinji Nakao
Takashi Sasanuma